An effective method to optimise plasma immersion ion implantation: Sensitivity analysis and design based on low‐density polyethylene

نویسندگان

چکیده

Abstract The performance of polymer surface treatment using plasma immersion ion implantation (PIII) depends on many operating parameters, such as duration, radiofrequency power, pulsed bias voltage and pulse repetition rate, the fluence applied surface. Currently, identification optimal parameters to achieve specific targets is heavily based trail error with extensive experimental testing. Herein, we present an optimisation method sensitivity analysis polynomial chaos expansion design Kriging surrogate model greatly reduce amount experiments. combined effects PIII low‐density polyethylene modifications are investigated, demonstrating validation effectiveness design. new approach offers highly accurate computationally efficient way for achieving optimum radical density, wettability optical transmittance that important biomedical applications.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Shielded platen design for plasma immersion ion implantation

A plasma treatment system (200) for implantation with a novel susceptor with shielding (203). The system (200) has a variety of elements such as a chamber in which a plasma is generated in the chamber. The system (200) also has a susceptor disposed in the chamber to support a substrate. A shield (203) is disposed adjacent to the susceptor for blocking impurities that may possibly be introduced ...

متن کامل

Coated platen design for plasma immersion ion implantation

A plasma treatment system (200) for implantation with a novel susceptor with a silicon coating (203). The system (200) has a variety of elements such as a chamber, which can have a silicon coating formed thereon, in which a plasma is generated in the chamber. The system (200) also has a susceptor disposed in the chamber to support a silicon substrate. The silicon coating reduces nonsilicon impu...

متن کامل

Removable liner design for plasma immersion ion implantation

A plasma treatment system (200) for implantation with a novel susceptor with a silicon coating (203). The system (200) has a variety of elements such as a chamber, which can have a silicon coating formed thereon, in which a plasma is generated in the chamber. The system (200) also has a susceptor disposed in the chamber to support a silicon substrate. The silicon coating reduces nonsilicon impu...

متن کامل

Semiconductor applications of plasma immersion ion implantation

Plasma immersion ion implantation (PIII) is an established technique in certain niche microelectronics applications such as the synthesis of silicon-oninsulator. In other applications such as shallow junction formation by plasma doping, trench doping, and fabrication of blue light emitting materials, PIII has unique advantages over conventional techniques and may be the technique of choice in t...

متن کامل

Perforated shield for plasma immersion ion implantation

A plasma treatment system (200) for implantation with a novel susceptor with a perforated shield (201). The system (200) has a variety of elements such as a chamber in which a plasma is generated in the chamber. The system (200) also has a susceptor disposed in the chamber to support a silicon substrate, which has a surface. The perforated shield (201) draws ions from the implantation toward an...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Plasma Processes and Polymers

سال: 2022

ISSN: ['1612-8869', '1612-8850']

DOI: https://doi.org/10.1002/ppap.202100199